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MKS Instruments 626A01TDE Pressure Sensor, Range 133.32Pa

The MKS Instruments 626A01TDE is a high precision vacuum gauge module designed for applications requiring accurate measurement of pressures in the range of 133.32 Pa (1 x 10^-3 Torr), essential for semiconductor manufacturing, research laboratories, and industrial vacuum systems.

Operating Range:133.32 Pa to 1000 mbar

Accuracy:+/- 1% F.S.

Response Time:≤ 1 minute at 70% full scale change

Power Consumption:≤ 2.5 mA

Connectivity:RS232 or RS485

Environmental Conditions:-40°C to +70°C operational, -55°C to +85°C storage

Material:Corrosion-resistant stainless steel

Dimensions:150mm x 76mm x 32mm

Weight:Approximately 0.2 kg

    The MKS 626A01TDE pressure sensor boasts a compact design specifically engineered for low-pressure vacuum applications. Its capacitive technology ensures exceptional measurement accuracy, even under extreme temperature fluctuations ranging from -40°C to +150°C.

    Equipped with a robust 1/4 NPT process connection, this sensor seamlessly integrates into various industrial systems, offering versatile compatibility with existing setups. Its 2-wire electrical connection simplifies installation and maintenance, minimizing downtime and maximizing operational efficiency.

    Engineered for long-term reliability, the MKS 626A01TDE pressure sensor features a ±0.1% full-scale accuracy, ensuring precise readings over its specified range of 133.32 Pa. This precision is critical for industries requiring meticulous control over vacuum conditions, such as semiconductor manufacturing, cleanroom operations, and scientific research.

    Innovative self-calibration features within the sensor maintain accuracy over time, reducing the need for frequent recalibration and saving on maintenance costs. The user-friendly interface allows for easy setup and adjustment, catering to both novice and experienced technicians alike.

    The MKS 626A01TDE pressure sensor is made from high-quality materials, combining durability with precision engineering. It is designed to withstand harsh environmental conditions, ensuring reliable performance in diverse industrial settings. With its combination of advanced technology and practical features, this sensor represents an excellent investment for enhancing operational efficiency and precision in vacuum control applications.

MKS 626A01TDE RANGE 133.32Pa




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